Room
- Clean Room 10K
- Clean Room 100K
- Process room
- Pilot Plant
Equipments in 10K Class - Cleanroom
- Mask Aligner
- Spinner
- Fume Hood
- Ultrasonic Cleaner
Equipments in 100K Class - Cleanroom
- Multi - Process Ball Bonder
- Interferometer Surface Profiler (Status : DOWN)
- Motic Microscope with CCD camera
- Plasma Cleaner/Sterilizer
- Electronic Dry Cabinet
- Laminator
- Hot Plate
Equipments in Process room
- Atomic force microscope
- Dimatrix material printer
- Interferometer
- Optical Microscope
- Biohazard Hood
- Vector Network Analyzer
- Potentiostat
- Syringe Pump
- Automatic Dispenser
- Sonicator
- Critical Point Dryer
- DI Water System
Pilot Plant
- Dicing saw
- Furnace
- 1000X Microscope