Room

• Clean Room 10K                                         
• Clean Room 100K                    
• Process room
• Pilot Plant

 

Equipments in 10K Class - Cleanroom

• Mask Aligner
• Spinner
• Fume Hood
• Ultrasonic Cleaner 

 

 

Equipments in 100K Class - Cleanroom

• Multi - Process Ball Bonder
• Interferometer Surface Profiler (Status : DOWN) 
• Motic Microscope with CCD camera
• Plasma Cleaner/Sterilizer
• Electronic Dry Cabinet
• Laminator 
• Hot Plate

 

 

 

Equipments in Process room

• Atomic force microscope
• Dimatrix material printer                
• Interferometer
• Optical Microscope
• Biohazard Hood
• Vector Network Analyzer
• Potentiostat 
• Syringe Pump
• Automatic Dispenser 
• Sonicator
• Critical Point Dryer
• DI Water System 

 

 

Pilot Plant

• Dicing saw
• Furnace 
• 1000X Microscope